High-tech fab in Dresden receives state-of-the-art electron-beam lithography system
Jena (ots) - Investment in new production tool for the semiconductor equipment industry. Jenoptik is investing a low double-digit million-euro amount in a state-of-the-art system for the high-tech fab currently under construction in Dresden. The new electron-beam lithography system (E-Beam) will be used to manufacture high-precision micro-optical components for ...
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