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02.04.2014 – 09:15

SÜSS MicroTec AG

SUSS MicroTec launches Mask Aligner MA200 Gen3

(DGAP-Media / 02.04.2014 / 09:09)


SUSS MicroTec launches Mask Aligner MA200 Gen3

Garching, April 2, 2014 - SUSS MicroTec, a global supplier of equipment and
process solutions for the semiconductor industry and related markets, has
launched the new Mask Aligner MA200 Gen3 today. The tool is designed for
high volume manufacturing and can be used for exposing wafers with a
diameter of up to 200 mm. This latest generation tool is a further
development of the very successful MA200 Compact platform, of which the
100th tool was recently delivered to a customer.

The MA200 Gen3 combines the well-established SUSS MicroTec Mask Aligner
technology with several new features, which render it the leading exposure
system in the areas of advanced packaging and MEMS. Special application
fields are exposure processes with thick photo resists for advanced
packaging, wafer level packaging and 3D integration as well as the
production of MEMS.

The third tool generation incorporates an improved throughput as well as a
better process administration and -definition. The new features lead to an
overall improved cost of ownership.

"Our well established Mask Aligner technology is upgraded regularly to meet
the latest technological challenges and is constantly developed further to
address the future demands of exposure applications.", says Frank P.
Averdung, President and CEO of SUSS MicroTec. "The advantages of the MA200
Gen3 are a high throughput of 140 200 mm wafers per hour coupled with very
good process reliability."

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS
MicroTec contributes to the advancement of next-generation technologies
such as 3D Integration and nanoimprint lithography as well as key processes
for MEMS and LED manufacturing. With a global infrastructure for
applications and service SUSS MicroTec supports more than 8.000 installed
systems worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit

SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451

End of Media Release


Issuer: SÜSS MicroTec AG
Key word(s): Enterprise

02.04.2014 Dissemination of a Press Release, transmitted by DGAP - a
company of EQS Group AG.
The issuer is solely responsible for the content of this announcement.


Language:    English
Company:     SÜSS MicroTec AG
             Schleissheimer Strasse 90
             85748 Garching
Phone:       +49 (0)89 32007-161
Fax:         +49 (0)89 32007-451
ISIN:        DE000A1K0235
WKN:         A1K023
Listed:      Regulierter Markt in Frankfurt (Prime Standard);
             Freiverkehr in Berlin, Düsseldorf, Hamburg, München,

End of News    DGAP-Media
261086 02.04.2014

Original content of: SÜSS MicroTec AG, transmitted by news aktuell